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DOWNLOADS > White Papers - Case Studies
Semiconductor Metrology Stage Micro Precision Automation's addresss trends in the Semiconductor market and develops a new metrology stage that doubles throughput, decreases wafer pre-alignment time five fold (to 600ms), increases performance five fold, in positional repeatabilitiy (to 5 nm) while at the same time, reduce cost and increase reliability.  Download [152 Kb]A team of engineers at Medica Corporation were challenged to build an optical blood cell analyzer in less than one year. This system required four-axes of motion, over fifty signals, and a high-speed network to handle the large amount of information that was streamed back to the host. The initial concept did not meet Medica’s specification, as it was over budget, prone to failure, and exceeded allowable temperatures on the critical axis that positioned the camera and optics. In working with Agile Systems, Medica’s engineers were able to find a solution that exceeded their goals, reduced system complexity and enabled them to reduce their time to market by more than six months. This enabled Medica to get their analyzer to market much faster. Download [511 Kb]The challenge in this application was to integrate the motor and motion control electronics inside the robot arm. The result is a radical reduction in wire harness cost and assembly labor, as well as improved product reliability and reduced floor space. Download [511 Kb]By mounting compact Agile MAX 2000™ Modules directly in the moving placement head, an overall reduction in moving head mass and a dramatic reduction in cabling complexity was achieved. Download [543 Kb]The challenge in this application was to double cutting speed by replacing steppers with servos, without requiring an expensive redesign program for the mechanical gantry. Download [489 Kb]The collaboration of Nanometrics and Agile Systems resulted in the smallest and most precise integrated metrology system in the industry. Agile Systems 4-axis MAX 3000™ with FireWire interface, digital amplifiers and high resolution sin/cos encoder feedback requires a footprint of only 3" x 5" x 2" replacing an external box the size of a large PC chassis. Download [123 Kb] |
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